Dynamic Range Tuning in 2D Molybdenum Disulfide NEMS Resonators Towards an Enhanced Mass Resolution

We report on the measurements of gate-enhanced dynamic ranges in resonant two-dimensional (2D) molybdenum disulfide (MoS
2
) nanoelectromechanical systems (NEMS) towards an enhanced mass resolution. By varying the DC gate voltage (V
GS
), we experimentally demonstrate continuous tuning of the dynamic range (DR) from 68.2 dB to 101 dB, leading to a record-high DR tuning range (ΔDR) up to 32.8 dB, in a fully-clamped circular 2D MoS
2
NEMS resonator. The enhanced DR leads to three times of improvement in the mass resolution from 218.1 yoctograms (yg) to 73.8 yg (1 yg=10
⁻²⁴
g), corresponding to the mass of an argon (Ar) atom. The desirable mass resolution benefits from both the ultrasmall mass of the 2D membrane and the ultrahigh DR. The results are important for fully leveraging the desirable properties of 2D NEMS resonators towards ultra-sensitive transducers.