Dual-Axis Piezoelectric Mems Micromirror with Adjustable Aspect Ratio of Lissajous Patterns through Structure Design and Electrode Arrangement

This study presents a novel structure and electrode design to realize the dual-axis piezoelectric MEMS scanning mirror. The design features include: (1) Two-stage curved actuator array for 2-D scanning: each curved actuator consists of the trapezoid-plate and ring-plate units driven respectively by different electrodes. Through the proposed structure and electrode designs, different aspect ratios of scanning patterns are achieved by simply altering the input-ports of driving signals. (2) Electrode pattern: the electrode pattern is designed based on stress distributions of the structure to improve output displacement. (3) S-shaped spring: spring width is designed to reduce stress during scanning. Measurement results demonstrate the proposed design reaches 30° for X-axis scanning at 5.45 kHz (8 V
pp
) and 20° for Y-axis at 5.2 kHz (6 V
pp
). It can also show Lissajous scanning patterns with various aspect ratios by easily applying driving signals to different actuator units.