An Interventional Microfabrication Process for Integration of Commercial Piezoelectric Films and Micro Structures for Ultra-Low Frequency Energy Harvesting

Integrating piezoelectric films on flexible micro energy harvesters (MEHs) significantly improves energy harvesting performance under low-frequency environmental vibrations. This paper presents a novel interventional method for integrating commercial piezoelectric films and microstructures for ultra-low frequency energy harvesting with high compatibility and low cost. This microfabrication process is featured by polydimethylsiloxane (PDMS) oxygen plasma bonding using an auxiliary-guiding wafer. The MEH integrated with commercial flexible piezoelectric films shows a prominent ultra-low-frequency performance, achieving a normalized power density (NPD) of 13.33 μW/cm
³
/g
²
around 2 Hz. These results provide a new strategy for achieving integrated flexible piezoelectric MEH.