Conformal Design and Fabrication of Wearable Piezoelectric Sensor Array for Spatiotemporal Distribution of Arterial Pulse Waves

This paper reports a wearable piezoelectric pressure MEMS sensor array for multi-site conformal sensing of pulse waves. Thinned bulk lead zirconate titanate (PZT) piezoceramic films with high performance are embedded into soft materials, allowing optimal deformability and conformality. Specifically, a spin-on polymeric adhesive is adopted to transfer uniform PZT film during bonding and releasing processes. As a result, the device of single element exhibits high sensitivity with 47.45 mV/N. Furthermore, it can capture a weak pulse with the spatial and temporal distribution without cross talk among channels, which has great potential applications in the diagnosis of cardiovascular disease.