Monolithically Integrated μPID on μCOLUMNS for Ultracompact Micro-Gas Chromatography

This report describes a monolithically integrated microfluidic photoionization detector (μPID) on a microfabricated gas chromatography (μGC) column via wafer-level batch processing based on a silicon-on-insulator (SOI) architecture. The integrated chip enables an ultracompact (0.9 liters and 0.9 kg), fully automated, and battery-operated μGC system. Rapid separation of seven volatile organic compounds (VOCs) in ~2 min at room temperature is demonstrated.