A Mechanically Amplified Quad Mass Gyroscope with Parameteric Σ-Δ Modulation for Offset Drift Cancellation

This paper, for the first time, presents a rhombus-like compliant mechanical amplification mechanism for silicon micro-machined resonant quadruple mass gyroscope (QMG) to improve its performance with an active area of 3×4mm
²
. The design electronics interface is based on an anti-aliasing multi-bit force feedback Σ-Δ loop that reduces the output offset and drift. This is achieved by parametric modulating of the fabricated QMG and nulling the offset via a Σ-Δ cancellation loop. The active circuit area is 2.5mm×5mm and consumes 18mW from a 5-V supply, while achieving a bias instability of 0.7°/hr and a ARW of 0.097°/√hr with the cancellation of mismatch between bond-wire offset in a system-in-package QMG.