A Highly Reliable Cryogenic Microelectromechanical Switch With Slot-Spring Structure For Quantum Computing Applications

This work presents a microelectromechanical (MEM) switch designed to reliably operate at a cryogenic temperature for quantum computing applications. By adopting a slot-spring structure, the MEM switch can have resilient characteristics to high thermal stress generated by the large temperature difference between room and cryogenic temperatures. Through Finite Element Method (FEM) simulation, we confirmed that the proposed MEM switch with the slot-spring structure not only effectively suppresses thermal stress, but also exhibits minimal deflection of less than 10 nm even at 10 mK. Consequently, the fabricated MEM switch demonstrated remarkable endurance of over 50 million cycles at 4.8 K. This outcome establishes the MEM switch as a viable candidate for cryogenic applications and highlights its potential for diverse implementations within the quantum computing field.