A Super Stretchable, Strain-Insensitive Vertical Serpentine Conductor Based On MEMS Technology

This paper reports a novel high aspect ratio (height/width) vertical serpentine conductor with superior performance. The conductor was developed and manufactured through silicon-based MEMS fabrication technology. For the first time, the serpentine structure can be fully stretched into straight status while maintaining structural integrity and electrical performance. The experiment results show the vertical serpentine conductors possess up to 4000% stretchability, and the relative resistance varies within 1.3% under 3500% applied strain. In addition, the superior durability and stability of the conductor have been verified after 20,000 cyclic stretching and releasing at 3000% applied strain, where the relative resistance only changes within 4.6%.