Characterization of Silicon Substrates for sub-THz Electronics, Benefit of The Beatty Resonator Test-Structure

The Beatty resonator is a classical test structure with significant utility in characterizing PCB substrate materials. This structure is widely acknowledged within the signal-integrity community and is even included in network-analyzer cal-kits.As integrated RF circuits now target frequencies exceeding 100 GHz, the Beatty resonator’s overall size has reduced to just a few millimeters, making it compatible with modern integrated circuit (IC) processes.This contribution explores the Beatty resonator’s application on a typical metallization stack for IC and highlights its advantages, particularly in complementing the substrate effective resistivity extraction.