Study on Electromagnetic Parameters of Inductively Coupled Plasma Based on Spectroscopy

With the continuous development of scientific instruments and techniques, plasma parameters can be measured and recorded more accurately. For example, using laser-induced fluorescence, microwave interferometry, spectral analysis and other methods can be real-time monitoring of plasma density, temperature and other parameters. In this paper, the spectral method is used to record and analyze the plasma parameters under different discharge power conditions. It is found that the plasma electron density increases first and then decreases with the increase of discharge power. After electromagnetic wave transmission diagnosis, it is found that the signal strength decrease first and then increase with the increase of discharge power.