Development of the damage evaluation technology of a low-k film by surface photo voltage

The un-contacting damage measurement technology of a low-k film by surface photo voltage (SPV) measurement using Quantox made from KLA-Tencor was developed. By SPV measurement, it was found that hysteresis exists in the low-k film, and that this hysteresis corresponded with the damage of the low-k film, i.e., the k-value increases. By using this phenomenon, the un-contacting in-line monitor of the low-k film is realized.