Design of HF Generator with ICP Torch Nonlinear Load Numerical Model

When developing electrotechnological equipment, one of the most important is-sues is the pairing of a power source and a nonlinear load (in our case, ICP plasma torch). The operation of the power supply is influenced by the following fac-tors: gas supply method, operating mode and gas composition. The character of the plasma flow in the plasma torch is influenced by the current-voltage characteristics of the power source. The article is devoted to numerical simulation of ICP plasma torch, HF generator and their mutual influence. This work is the first in a series of works. The operation of the plasma torch on Ar is considered.