Optimization Algorithm Research and Design of Chip Manufacturing Virtual System Based on SECS/GEM

In order to improve the production efficiency, improve the product quality and reduce the cost in the field of chip manufacturing, this paper designs a virtual system based on SECS/GEM protocol to simulate the real production process of chip manufacturing, so as to optimize each stage of chip manufacturing. The system includes a equipment-side program that simulates the equipment and a host-side program that interacts with it. The host-side can collect state data from the equipment and monitor the equipment. Secondly, in order to improve production efficiency, an optimization algorithm of job shop scheduling based on reinforcement deep learning is designed. Experiments show that the system can simulate the process of chip manufacturing to some extent, optimize and improve the manufacturing process, and improve the overall efficiency of the equipment.