An Equivalent Circuit Model of Self-Assembled Electret Mems Vibration Energy Harvesters Based on an Energy Diagram in Hardware Description Language

This paper reports a hardware-description-language (HDL) equivalent circuit of self-assembled electret (SAE) micro-electro-mechanical systems (MEMS) vibrational energy harvesters (VEHs) considering the energy diagram. The equivalent circuit allows analysis of the relationship between output current and SAE properties, device structures, and electrode materials. Also, the HDL on Cadence Virtuoso, an industry-standard software tool for integrated circuit (IC) design, enables us to co-design SAE-MEMS VEHs with various ICs. The validity of the model is confirmed by comparing the measurement and simulation results.