Low Pressure MEMS Sensor: Analysis and Experimental Demonstration

In this paper, we analyze the dynamic response of a MEMS device made of a microplate supported by two microcantilever beams and electrically actuated via an underneath electrode. We employ the motion-induced current method to capture its dynamic response under varying pressure. We show the potential use of the MEMS device as a pressure sensor by leveraging squeeze-film damping and other nonlinear dynamic phenomena associated with its motion. The present study reveals the possible tuning of the MEMS device to operate in analog and binary modes. Analog-based detection is achieved within the low pressure range of 2.2-52 mbar. We also demonstrate the use of the MEMS device in binary mode, acting as a pressure switch, with a capability to detect low pressures down to sub-millibars.