Low Temperature sensor based on optimized Z-shaped beam actuator

This work focuses on the performance of a modified Z-Shaped chevron actuator, thermally actuated, based on an arrangement of 8 pairs of beams anchored at their outer ends. The numerical analysis was performed using ANSYS™ Workbench software to obtain displacement and compare it with results of the experimental and theoretical analysis. Using a maximum temperature of 65°C, the displacement in the shaft, experimentally obtained, corresponds to 2.53 mm, while in the theoretical model the displacement value is 2.54 mm, that means an error of 0.65%. An amplification factor of approximately 59.2 is obtained. In the numerical model, the increase in each beam’s length is of 0.067 mm applying the same temperature, while the displacement value of the shaft is 3.97 mm.