Dual-wavelength neural probe for simultaneous opto-stimulation and recording fabricated in a monolithically integrated CMOS/photonics technology platform

We present the development of a monolithically integrated CMOS and photonics platform, capable of supporting passive and active visible photonics with thermooptic switches. This platform is co-integrated with a 130-nm SOI-based 6-level Al-BEOL, enabling a range of bi-modal opto-electronic sensor applications. Through this platform, we demonstrate an implantable CMOS-based neural probe that integrates a high-density array of 960 selectable electrodes and 384 recording channels, along with 14 programmable optical emission sites for two visible wavelengths: 450 and 638 nm. The probe offers the neuroscience community a new technique for cell/circuit-specific activity and neural modulation monitoring through optogenetics-based optical tagging.