COMSOL Modeling of ISFET for pH Sensing and Antigen-Antibody Detection

This paper describes the development and validation of a comprehensive COMSOL Multiphysics ® simulation model for Ion-Sensitive Field Effect Transistors (ISFETs) used for pH sensing. The model accurately captures the performance of fabricated ISFETs in measuring multiple pH electrolytes and also enables exploration of different sensing membrane materials and their thicknesses and impact on device sensitivity. The study validates the accuracy of the simulation model through laboratory experiments using a commercial ISFET with a Si3N4 layer as the sensing membrane. Based on the optimized ISFET model, the study further extends its scope to develop a simulation model for antigen-antibody detection, enabling the development of point-of-care devices.