Design and Optimization of MEMS Comb Type Capacitive Accelerometer

In this paper, design and optimization of MEMS comb type capacitive accelerometer has been presented. The objective of this work to study the deformation, resonant frequencies and capacitance changes in comb type capacitive accelerometer with the thickness of 30µm of silicon wafer by using the simulation software of ANSYS and Ansys Maxwell based on the Finite Element Method (FEM). At first, the deformation of MEMS capacitive accelerometer structure at the X-axis and Y-axis which plays an important role for measuring of capacitive changes in comb type accelerometer by acting the acceleration range of 100g to 500g and its resonant frequencies. Further to enhance the capacitance changes and increase in the number of comb-drives up to 20 is done. Subsequently, capacitance changes values between comb-drives were obtained from the modeling results with the number of comb-drives from 1 to 20. To optimize the sensitivity of the comb type capacitive accelerometer, this design is more suitable for comb type structure.