Annealing Temperature Variation for Improved Sensitivity of NOx Gas Sensor

In this study, a zinc oxide (ZnO) thin film is used to build a NO
x
(NO, NO
2
) gas sensor. For the gas concentration of 500 ppm, the analysis has been done at various detecting surface annealing temperatures. The study investigated changes in gas sensing at annealing temperatures. It was found that the best sensing response for the provided samples is with bare ZnO thin film at 650 °C annealing temperature and 180 °C optimal operating temperature. The effects of changing the annealing temperature of ZnO-based thin films on optical, structural, and gas-sensing characteristics are examined in this study.