The role of structural factor in In/sub 2/O/sub 3/ gas response

In this paper we examined the influence of In/sub 2/O/sub 3/ film structure on their gas sensing characteristics. Films were deposited by spray pyrolysis from InCl/sub 3/-water solutions. Regularities of a correlation between gas sensing parameters and such structural parameters as film thickness, grain size, refraction index, and texturing were established. Some requirements of the In/sub 2/O/sub 3/ film structure for a gas sensor, designed for detection of both reducing and oxidizing gases, were formulated as well.