Array of PZT pyroelectric thick-film sensors for contactless measurement of XY position

The paper presents the design, fabrication and experimental characterization of a pyroelectric sensor array made by 8/spl times/8 pixels of PZT screen printed on an alumina substrate. When an amplitude-modulated light emitting diode (LED) is placed in front of the array and moved in the XY plane parallel to the array surface, the array and the LED respectively work as the reference element and the contactless cursor of a two-dimensional position sensor.