Low drift air-gap CMOS-FET gas sensor

We developed a low drift CMOS GasFET for a wide variety of gases like H/sub 2/, NH/sub 3/ or NO/sub 2/ combining the advantages of previous CCFET and SGFET concepts. The design comprises an insulated floating electrode structure for hybrid-mounted sensitive gates. The transducer has a low long term drift and temperature coefficient, comparable to a MOSFET, as measurements under real conditions prove.