Design and Evaluation of A Long Stroke 2-DOF Permanent Magnet Synchronous Planar Motor

Precise planar positioning stages with fast response over long stroke are highly desirable for many high precision operations. A novel two-degree of freedom permanent magnet synchronous planar motor (2-DOF PMSPM) is presented in this paper, which is capable of traveling over large displacements and complex motions. The airgap magnetic field, electromagnetic force and translational motion of the 2-DOF PMSPM are analyzed by calculation model. By establishing a two-dimensional (2D) positioning control module, simulation and analysis of both uniaxial and planar coupled motions are carried out. The results exhibit favorable tracking performance of the motor under different given trajectories, thus validating the accuracy and feasibility of the motor design principles.