Study of Thin Film Blue-Light MicroLEDs by Laser Lift-Off and Texture Process

In this study, thin-film blue-light micro-light-emitting diodes (
$\mu $
LEDs) were successfully fabricated by laser lift-off technique, which had an emission region of only
$10\,\,\mu \text{m}\,\,\times 10\,\,\mu \text{m}$
. Additionally, a texturing treatment was applied to the top undoped GaN surface. The texturing time was optimized to prevent a total reflective effect and further enhance the light extraction efficiency. As a result, the emission output power (@ 30 mA) and EQEmax of the
$\mu $
LED textured for 2 minutes exhibited 1.35 times and 1.64 times higher values as compared with those of
$\mu $
LED with a sapphire substrate, respectively.