Polymeric optical waveguide modulators and their applications

Summary form only given. We have fabricated and tested a number of different Mach Zehnder amplitude modulators. The devices are fabricated on silicon substrates with passive polymers used for the upper and lower claddings. The electro optic polymer core layer is patterned into ridge waveguides using RIE. The total thickness between the ground plane and the upper micro-strip line electrode was 7.5 /spl mu/m. The end facets of the waveguide were diced for light coupling.