High-Frequency Operation of Low-Power Single-Flux-Quantum Circuits Fabricated Using 250 A/cm2 Nb/AlOx/Nb Planarization Process

Superconductor single-flux-quantum (SFQ) integrated circuits can provide classical, general-purpose digital processing at cryogenic temperature near quantum bits. We report high-frequency operation of low-power SFQ circuits using a lowered critical current density fabrication process and low-voltage design. We are developing a standard-cell library with integrated devices featuring four planarized Nb layers and a Pd resistor layer. SFQ shift registers successfully operated at up to 11 GHz at 0.3 K. The measured operating frequency is sufficient for SFQ-based digital controlling of quantum bits using impulse-shaped voltage pulses.