Design and Modelling of a Micro Flow Sensor Based on Finite Element Method

With the progress of the research on MEMS, the traditional industry and fluid mechanics research of flow sensor reach to the high level of integration, miniaturization, high precision, high reliability direction. At the same time, the development of life science greatly promoted for microfluidics, study subjects such as biology, medicine, health have also improved the development of new type micro flow sensor. Micro flow sensor has become an important research direction. In this paper, based on the MEMS manufacturing process, a flow sensor with a titanium layer of 300 nm is designed and simulated by using FEM software in the environment of machining thickness of 100 nm grade and flow rate of microliter grade. Simulation result shows that when applying a flow rate of
$10\ \mu\mathrm{L}/\min$
, temperature difference
$\Delta\mathrm{T}$
between the two temperature sensors is about 12°C to 14°C.