Microlens fabrication by the modified LIGA process and its modeling and analysis

A microlens and microlens arrays is realized using a novel fabrication technology based on exposure of a resist, usually PMMA (Polymethylmethacrylate), to deep X-rays and subsequent thermal treatment. Moreover, a prediction model for microlens formation is presented. A simple analysis based on the new model is applied to predict maximum heights of the microlens which depend on the thermal treatment.