Micro-fabricated system for wavelengths monitoring

Presents a new design of a time-scanning Michelson interferometer realized by silicon micro-machining, more particularly with silicon-on-insulator (SOI) technology. The new design allows auto-calibration of the motion of the scanning mirror. The device is suitable for monitoring about 50 channels at the telecom wavelength (/spl lambda/=1.5/spl mu/m).