A High-Quality-Factor Aluminum Nitride Resonator with Silicon Dioxide Composite Structure

A high-quality-factor composite structure resonator is presented, which consists of a silicon dioxide (SiO
2
) composite structure driven by an aluminum nitride (AlN) transducer positioned underneath. With the kinetic energy primarily concentrated in the upper SiO
2
composite layer, the series quality factor (Q
s
) of this resonator is significantly enhanced. The spurious modes are effectively eliminated by modifying the composite layer into split rods-shaped structure. A simulated series quality factor of 3110 is achieved at 1.45 GHz, with a spurious-free frequency spectrum spanning over a range of more than 1.4 GHz. This resonator holds great potential for high-precision oscillator applications.