Multi-Channel Piezoelectric Micromachined Transducers Using On-chip Passive Filtering

This study introduces an innovative design of multi-channel Piezoelectric Micromachined Transducers (PMUTs) with on-chip passive filtering. The design enables simultaneous wireless power transfer and data communication, expanding the application potential of PMUTs. The design achieves a multi-channel link by driving PMUTs across multiple modes, designating a low-frequency channel for power transfer and a high-frequency one for data communication. An adjacent PMUT on the same receiving array serves as a passive filter, facilitating efficient channel selection and demodulation. The design demonstrates a high data transfer rate and low bit error rate, confirming the feasibility and efficiency of multi-channel PMUT arrays with integrated passive filtering.