Electrode Confined Acoustic Wave (ECAW) devices for Ultra High Band applications

This paper presents a new approach to increase the operational frequency of Surface Acoustic Wave devices. The excitation of a new type of mode called ECAW ( Electrode Confined Acoustic Wave) exhibiting a phase velocity much higher than the one of a standard SAW is demonstrated. In this context, a new composite substrate is considered to guarantee a perfect spectral purity. Therefore, Piezo-On-Glass substrates are manufactured and used for the manufacturing of ECAW device prototypes. Preliminary results show a frequency at 2.5 GHz with an IDT pitch equal to 2 μm. In terms of power handling, widest tested components successfully handle up to 36 dBm without destruction of the devices.