Technology for Obtaining Membranes Based on Porous Silicon

A technique has been developed and tested for obtaining membranes based on porous silicon structures with a different pore morphology (such as nanostructured silicon, macrostructured silicon, and structures with gradient porous layers with a variable morphology (GPSi-var)). The influence of mechanical stresses on the destruction of membranes during mechanical processing was studied. The technology allows to create membranes based on a porous silicon structure with low mechanical stresses which can be used in various filtering devices with modifying characteristics of the porous layer depth and the pore diameter.