Galvanometer Based In-situ Imaging and Inspection System with Variable Ranges and Resolutions

In-situ measurement and inspection is essential for laser precision machining. This paper proposes a novel in-situ imaging system using a galvanometer scanner and a luminance sensor. The system operates by having the galvanometer scan the plane in a point-by-point manner, while the luminance sensor records the light intensity at each point. By organizing the recorded light intensities based on their corresponding positions, an image of the scanned plane is obtained. Compared with the existing in-situ imaging systems, the proposed one could realize variable imaging ranges and resolutions, and directly provides the image in the angle coordinates of galvanometers. Various experimental results demonstrate the imaging capability and the spatial resolution of the proposed system. Furthermore, a blind deblurring technique is employed to enhance the image quality. This system has the potential of achieving in-situ laser processing and inspection.