Design of a Flexure Mechanism Based on ETC Type Two-axis Flexure Hinges for Nano-positioning

Two-axis flexure hinges play a pivotal role in the design of spatial flexure-based mechanisms for nano-positioning. In this study, we have undertaken the development of an asymmetric XYZ translational nano-positioning stage, incorporating a novel type of flexure hinges characterized by elliptical transverse cross-sections (ETC). The structure design of both the flexure hinge and the flexure mechanism is outlined. Furthermore, the motion characteristics of the flexure mechanism are investigated and compared with a flexure mechanism of identical configuration, but utilizing traditional flexure hinges with rectangular transverse cross-sections (RTC). Our findings reveal that substituting the RTC type flexure hinges with the ETC type ones has minimal impact on the motion transfer of the flexure mechanism with an identical configuration. However, under identical displacement actuation, the ETC-type flexure hinges exhibit reduced stress concentration, resulting in lower maximum stresses within the mechanism. Additionally, the ETC-type flexure hinges demonstrate increased compliances, leading to decreased actuating forces and indicating a higher level of transmission efficiency.