Preparation of Micro Gripper Pincer End with Bionic Superhydrophobic Surface and Analysis of Gripping Performance

In recent years, micro grippers have been widely used in the micro/nanomanufacturing industry. However, during their application, the end face of the micro gripper pincer tends to adsorb impurities, making it difficult to release small objects during the gripping process, which affects their processing efficiency. To overcome these drawbacks and improve the performance of micro grippers, this study utilizes laser ablation micro/nano composite structures combined with fluorosilane chemical modification to rapidly prepare superhydrophobic surfaces with special wetting properties at the end of the micro gripper pincer, and the water contact angle (WCAs) at the pincer body reaches 156. 2 ± 2.0°, and the rolling angle (RAs) reaches 2. 2 ± 0.6°. The surface of this type of micro gripper effectively suppresses the adsorption of impurities at the gripping end and enhances the release performance of the gripper for microparticles. Additionally, this study systematically investigates the formation mechanism of the superhydrophobic surface on the pincer end of micro gripper by the analysis of three-dimensional surface topography and surface chemical composition, providing a foundation for the rapid preparation of superhydrophobic functional surfaces on gripper ends.