High-bandwidth silicon micro-ring modulator employing low-loss waveguide bends

We employ a low-loss waveguide bend design having gradually-changed width and bending radius to realize a high-speed silicon micro-ring modulator (MRM) for o-band. The resultant silicon MRM enables a tuning efficiency of 35 pm/V, a quality factor of 5020, and an electro-optic bandwidth of 55 GHz.