Fabrication and characterization of polymer CMUTs

This paper describes the fabrication and electrical characterization of a capacitive micromachined ultrasonic transducers manufactured using polymers. The SU-8 was used as structural material and PMGI as sacrificial material. Both materials are deposited by spin-on process which is simpler and a low-cost approach if compared to non-organic thin films. The characterization presents devices working at the MHz range with efficiency of 37% in the electrical to mechanical conversion.