Progress in process development of La0.7Sr0.3MnO3 thin films for uncooled THz bolometers

We present preliminary results of uncooled THz bolometers based on La
0.7
Sr
0.3
MnO
3
thin films on SrTiO3 buffered high resistivity silicon substrates. Fabrication improvements enable to obtain low contact resistance and the impedance measurements show that it is possible to minimize the impedance mismatch with an antenna.