Design of Gas Pressure Control System With the Silicon Resonant Pressure Sensor

A gas pressure control system with the silicon resonant pressure sensor is designed in this paper to realize the precise control of gas pressure, which takes an STM32F407 microcontroller as the main controller adopts a high-precision silicon resonant pressure sensor to collect the current air pressure value in real-time, and takes the structure of two high-speed solenoid valves to control the gas container as the research object. A closed-loop control system with real-time acquisition and real-time control is established. According to the difference between the target barometric pressure value and the actual barometric pressure value, the microcontroller controls the high-speed solenoid valves to make corresponding actions to regulate the pressure. The experimental results show that the pressure controller has good pressure control performance, with a range of 2kPa-350kPa and an accuracy of 0.02%FS, which can meet industrial production needs.