Silicon Parallel-Plate Waveguide with Controlled Boundaries for Broadcast Applications in WiNoC Architecture

In this paper, a silicon parallel-plate waveguide dedicated to multicast signal propagation is studied around 60 GHz for Wireless Network-on-Chip (WiNoC) type interconnects. The aim is to maximize the bandwidth allowing broadcast communications. The suggested solution uses embedded dipole antennas permitting electromagnetic waves propagation on the silicon substrate between two metallic planes. First, a network of 4 dipole antennas is simulated and measured for an inter-element distance of 14 mm on a High Resistivity Silicon (HR-Si) substrate surrounded by a Low Resistivity Silicon (LR-Si) substrate. Secondly, the signal propagation for an array of 4 TSV antennas is studied to demonstrate the advantage of using isotropic antennas for broadcast communications. Finally, perspectives are presented for signal propagation for antenna network.