Simulation and Fabrication of SU-8 Microfluidics Mixers capped by Wafer-to-Wafer Bonding

In addition to other technologies, microsystems technology is now proving to be an important key technology for the realization of new life science applications. The transition between the two scientific fields is fluently. An important area of application of the manufacturing processes of microsystems technologies in life sciences is e.g., the production of complex microfluidic structures and micromixers. In this work, the design, simulation and the manufacturing process of micromixers will be presented. The mixing behavior of different microfluidic designs are simulated using ANSYS Fluent. In addition, certain parameters of the mixer are considered theoretically in order to verify the results of the simulations. A process development manufactured on wafer level, including spincoating, bonding and laser-drilling has been done, to gain different types of micromixers as demonstrators. Finally, the simulation results are compared with the results of the micromixers.