High Performance Torque Sensing Element Based on Surface Acoustic Wave Resonator

SAW torque sensor is an important method in torque detection, and sensing element is an important part of sensor. Therefore, the design and analysis of the torque sensing element in SAW technology hold significant importance. In this study, The SAW torque sensing element was simulated and analyzed by finite element simulation software, the SAW torque sensing element was fabricated through the use of MEMS processes. Finally, the SAW torque testing platform was built, and the SAW torque sensing element was tested and analyzed. The results of three loading tests show that the sensitivity of SAW torque sensing element is 4.0045kHz/N•m, 4.0044kHz/N•m and 4.0011kHz/N•m. The results show that the designed SAW torque sensing element has good sensitivity and provide a good guidance for the application of SAW torque sensor.