Study on the Impact of Laser Trimming on Stability of TaN Thin Film Resistors

TaN thin film resistors were trimmed by 355nm UV laser with pattern of dot array cut. After environment tests, the resistance increased significantly for resistors without high temperature stabilization procedure, by 3.31% in average; but for the resistors with high temperature stabilization procedure, the resistance increased a little, by 0.28% in average. The experiments showed that high temperature stabilization procedure could improve the stability of TaN thin film resistors, and laser trimming had little impact on the stability of TaN thin film resistors.