A Novel Four-Port Calibration Method for High Frequency On-Wafer S-parameter Measurement

This paper proposes a novel four-port calibration method for on-wafer S-parameter measurement. Crosstalk terms can seriously deteriorate the measurement accuracy of high-frequency on-wafer systems. The proposed method can consider all error and crosstalk terms in on-wafer measurement using two ground-signal-signal-ground (GSSG) probes and ensure high calibration accuracy. Only six calibration standards are required to complete the four-port calibration by this method. The proposed method is verified by full-wave simulations up to 100 GHz. The simulation and calibration results are in great agreement, which proves the correctness and reliability of the proposed method.