Manufacturing and electrical performance of quartz circuit based on 94 GHz phased array antenna

In this paper, a 94 GHz terahertz multibeam phased array antenna is developed and simulated by finite element analysis software HFSS. A dual-layer quartz circuit with operating frequency of 94 GHz is realized. The manufacture process of the quartz circuit mainly includes the through glass via (TGV) process of single layer quartz circuit, the preparation of metal circuit pattern of quartz substrate and the gold bonding technology of double layer quartz substrate. The actual test results of the phased array antenna are consistent with the simulation of HFSS, which verifies the design idea and method proposed.