A Novel Compact Compliant Bridge Type Micro-positioning Stage with a Large Displacement Amplification Ratio

This research addresses the increasing demand for precise displacement control with larger ranges in piezoelectric actuators for positioning stages. To fulfill this requirement, a compliant piezoelectrically driven micro-positioning stage with a high amplification ratio is proposed. The structural design incorporates a twin-bridge type mechanism to amplify actuator displacement and enhance modal shape frequencies. Displacement transmissions and amplification mechanisms are paired with leaf flexure-based parallelogram mechanisms to linearize the output movement. Additionally, four major bridge mechanisms are arranged in parallel to improve the piezoelectric actuator’s output displacement. Computational optimization of the positioning stage’s architecture is performed to maximize output displacement and increase the modal shape frequencies. The impact of geometrical design parameters on the stage’s displacement is investigated through Ansys analysis. Experimental validation confirms that the positioning stage achieves a motion precision of 0.5 µm and an amplification ratio of 28.78, demonstrating its effectiveness for precise displacement applications.