Acoustic Coupling and Remote Excitation in an Array of Multi-Mode Piezoelectric Micromachined Ultrasonic Transducers

SummaryThis paper investigates acoustic cross-coupling and remote excitation in an array of PMUTs (piezoelectric micromachined ultrasound transducers). Though undesired cross-talk can impact on PMUT array performance, the same can be also employed for remote excitation. The device array under study comprises of 7 PMUTs with constant pitch which is designed and characterized at the fundamental and higher order modes. The insights are employed to demonstrate a remote frequency filter and dual-channel excitation employing acoustic coupling.