Laser Structured Silicon Based Multi Fourier Horn Resonator

This paper reports a Silicon (Si)-based, multiple Fourier-horn ultrasonic nebulizer (MFHUN) which was fabricated through femtosecond laser structuring of Si to reduce sample preparation time and study the effectiveness of this manufacturing process for Si-resonating structures. The system showed better transfer characteristics than what is reported in literature, giving the presented nebulizer the advantage of higher power efficiency and lower individual sample preparation costs.